Model

ET-EVAP400C-1

Ref. Pictures

Main Vacuum Chamber

Rectangle 304 Stainless steel chamber, Size: 400mm×400mm×450mm. The front door is full auto control (integrated with glove box), the outside door is hinged type for service. The two doors are provided with an observation window. The chamber is provided with a lighting and film thickness instrument and another equipment interface.

Vacuum System

Pumping by turbo-molecular pump (pumping speed 1200L/S) + Joint venture direct coupling rotary vane pump (pumping speed 9L/S), high vacuum electro-pneumatic valves, full automatic control

Ultimate Vacuum

≤6×10^-5Pa

Pumping Speed

Pumping from air to 9×10^-4Pa≤30min（short time expose in the air, feeding dry Nitrogen, then starting vacuum）

Substrate system

Sample Size

Drawer type structure, carrying a maximum of less than 120 x 120mm samples, equipped with Japan SMC pneumatic substrate baffle, electrical linkage fully automatic control

Moving Mode

• The substrate table adopts the magnetic fluid seal, which can be lifted and lifted, and the distance between the source and the substrate can be adjusted continuously by 200~300mm.；

• The substrate table can rotate continuously, and the rotating speed is 0~30

• Above processing are full auto control

Heating

Room temperature ~300℃, Japan SHIMADEN PID intelligence temperature control system

thermal source

Metal Thermal

Source

2units, Water cooling pure cooper electrodes+ thermal boat

Organic Thermal Source

sing PID temperature organic beam source furnace, the crucible is larger than 2CC, room temperature of ~300 ℃, continuously adjustable

Thermal power

Metal Thermal Power

Current 300A, maximum output power 3KW（Conversion for two sets of alternating evaporation）

Organic Thermal Source

PID Intelligent temperature controlled evaporation power supply (temperature control accuracy±1℃）

Coating Thickness Control System

The quartz crystal film thickness controller, monitoring the thickness of the display range: 0-99μ9999Å

Water Cooling System

Equipped with cooling water circulation machine, the user only need to provide the site

Alarm & Protect System

Perfect logic program interlock and protection system, the pump, electrode and other water shortage, over current over-voltage, open circuit and other abnormal alarm and the implementation of the corresponding protection measures

Coating thickness non-uniformity

Φ100mm≤±5.0%

Glove box System

Glove Box chamber

Chamber size: 1500×750×900mm

Main antechamber:¢360×600mm，mini-chamber: ¢150×300mm

Height of stand: 950mm

Gas purify System

Moisture & oxygen <1ppm

Single Column Purification System

Solvent Purification System

GE US brand moisture & oxygen analyzer

Control mode

PLC+PC full auto control